Fabrication of p-Type ZnO Thin Films via DC Reactive Magnetron Sputtering by Using Na as the Dopant Source

2007 ◽  
Vol 36 (4) ◽  
pp. 498-501 ◽  
Author(s):  
L. L. Yang ◽  
Z. Z. Ye ◽  
L. P. Zhu ◽  
Y. J. Zeng ◽  
Y. F. Lu ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Thin Films ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
P Type ◽  
Dopant Source

Properties of ZnO thin films deposited by DC reactive magnetron sputtering under different plasma power

2009 ◽  
Vol 97 (2) ◽  
pp. 437-441 ◽  
Author(s):  
Dongping Zhang ◽  
Ping Fan ◽  
Xingmin Cai ◽  
Jianjun Huang ◽  
Lili Ru ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Zno Thin Films ◽  
Reactive Magnetron ◽  
Plasma Power ◽  
Dc Reactive Magnetron Sputtering
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