Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

2008 ◽  
Vol 254 (8) ◽  
pp. 2250-2254 ◽  
Author(s):  
Young Ran Park ◽  
Eung Kwon Kim ◽  
Donggeun Jung ◽  
Tae Seok Park ◽  
Young Sung Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Growth of Al-doped ZnO thin films by pulsed DC magnetron sputtering

2005 ◽  
Vol 277 (1-4) ◽  
pp. 352-358 ◽  
Author(s):  
Hyungduk Ko ◽  
Weon-Pil Tai ◽  
Ki-Chul Kim ◽  
Sang-Hyeob Kim ◽  
Su-Jeong Suh ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering

2010 ◽  
Vol 518 (11) ◽  
pp. 2984-2987 ◽  
Author(s):  
Jun-ichi Oda ◽  
Jun-ichi Nomoto ◽  
Toshihiro Miyata ◽  
Tadatsugu Minami
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Doped Zno

Physical properties of transparent conducting indium doped zinc oxide thin films deposited by pulsed DC magnetron sputtering

2008 ◽  
Vol 23 (2-4) ◽  
pp. 536-541 ◽  
Author(s):  
Young Ran Park ◽  
Donggeun Jung ◽  
Ki-Chul Kim ◽  
Su Jeong Suh ◽  
Tae Seok Park ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Physical Properties ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering

2010 ◽  
Vol 519 (1) ◽  
pp. 385-390 ◽  
Author(s):  
Tadatsugu Minami ◽  
Jun-ichi Oda ◽  
Jun-ichi Nomoto ◽  
Toshihiro Miyata
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Impurity Doped ◽  
Doped Zno
Sign in / Sign up

Export Citation Format

Share Document