Thermal radiative properties of carbon materials under high temperature and vacuum ultra-violet (VUV) radiation for the heat shield of the Solar Probe Plus mission

2012 ◽  
Vol 258 (7) ◽  
pp. 2829-2835 ◽  
Author(s):  
M. Balat-Pichelin ◽  
J. Eck ◽  
J.L. Sans
Keyword(s):  
High Temperature ◽  
Carbon Materials ◽  
Ultra Violet ◽  
Radiative Properties ◽  
Heat Shield ◽  
Thermal Radiative Properties ◽  
Solar Probe Plus ◽  
Vacuum Ultra Violet

Vacuum ultra-violet spectroscopic ellipsometry study of sputtered BeZnO thin films

Optik ◽  
2011 ◽  
Vol 122 (22) ◽  
pp. 2050-2054 ◽  
Author(s):  
Jebreel M. Khoshman ◽  
Martin E. Kordesch
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Ultra Violet ◽  
Vacuum Ultra Violet

Thermal radiative properties of glass from 0.32 to 206 μm

Solar Energy ◽  
1979 ◽  
Vol 22 (1) ◽  
pp. 37-43 ◽  
Author(s):  
C.K. Hsieh ◽  
K.C. Su
Keyword(s):  
Radiative Properties ◽  
Thermal Radiative Properties

Transient And Spatial Radiative Properties Of Patterned Wafers During Rapid Thermal Processing

1995 ◽  
Vol 387 ◽  
Author(s):  
Peter Y. Wong ◽  
Ioannis N. Miaoulis ◽  
Cynthia G. Madras
Keyword(s):  
Heat Transfer ◽  
Heat Source ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Temporal Variations ◽  
Radiative Properties ◽  
Wafer Surface ◽  
Patterned Wafers ◽  
Thermal Radiative Properties ◽  
Dynamic Variations

AbstractTemperature measurements and processing uniformity continue to be major issues in Rapid Thermal Processing. Spatial and temporal variations in thermal radiative properties of the wafer surface are sources of non-uniformities and dynamic variations. These effects are due to changes in spectral distribution (wafer or heat source), oxidation, epitaxy, silicidation, and other microstructural transformations. Additionally, other variations are induced by the underlying (before processing) and developing (during processing) patterns on the wafer. Numerical simulations of Co silicidation that account for these factors are conducted to determine the radiative properties, heat transfer dynamics, and resultant processing uniformity.

Sign in / Sign up

Export Citation Format

Share Document