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2021 ◽  
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Satoshi Terayama ◽  
Yuuki Iwase ◽  
Sho Hayakawa ◽  
Taira Okita ◽  
Mitsuhiro Itakura ◽  
...  
Keyword(s):  
Molecular Dynamic ◽  
High Energy ◽  
High Energy Particle ◽  
Molecular Dynamic Simulations ◽  
Face Centered Cubic ◽  
Energy Particle ◽  
Dynamic Simulations ◽  
Cubic Metals ◽  
Particle Irradiation ◽  
Face Centered

Impact of High-Energy Particle Irradiation on Polycrystalline Silicon Films

2001 ◽  
Vol 82-84 ◽  
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Masashi Nakabayashi ◽  
H. Ohyama ◽  
Eddy Simoen ◽  
Cor Claeys ◽  
K. Tanaka ◽  
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Keyword(s):  
Polycrystalline Silicon ◽  
High Energy ◽  
Silicon Films ◽  
High Energy Particle ◽  
Energy Particle ◽  
Particle Irradiation ◽  
Polycrystalline Silicon Films
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