scholarly journals Finite Fracture Mechanics at the micro-scale. Application to bending tests of micro cantilever beams

Author(s):  
Sara Jiménez Alfaro ◽  
Dominique Leguillon
Author(s):  
Jian Chen ◽  
Ganesh Subramanian ◽  
Justin Ricci ◽  
Liang Ban ◽  
Cetin Cetinkaya

A non-contact testing and characterization method based on air-coupled acoustic excitation and interferometric displacement measurements of micro-scale MEMS structures at room conditions is introduced. In demonstrating its potential uses in testing and characterization, the present non-contact approach is applied to (i) micro-cantilever beams and (ii) rotational disk oscillators. Air-coupled multi-mode excitation of micromechanical cantilever-type oscillators under a pulsed acoustic field generated by an air-coupled transducer is demonstrated and reported. Also, the testing and characterization of a micro-scale rotational disk oscillator developed for a new class of sensor platform is demonstrated. The main design objective of the rotational disk oscillator class is to overcome the out-of-plane motion related sensitivity limitations of the cantilever-based sensors at high frequency operations. The dynamics of the rotational disk oscillators is more complex than micro-cantilever beams due to its in-plane motion in addition to its various out-of-plane modes of vibration. The fabrication of a rotational disk oscillator requires a suspended disk whose underside is visibly inaccessible due to a narrow micro-gap. In addition to the dynamic characterization of the cantilever beams and rotational disk oscillators, the current investigation demonstrates that the presented approach can address unique structural concerns such as the verification of a gap separation of the rotational oscillator from the underlying silicon substrate. Utilizing the proposed technique, the resonant frequencies of the oscillator structures are obtained and its potential uses in the testing and characterization of micro-scale structures are discussed. The major specific advantages of the introduced approach include that (i) its noncontact nature can eliminate testing problems associated with stiction and adhesion, and (ii) it allows direct mechanical characterization and testing of components and sub-components of a micro-scale devices.


2020 ◽  
Vol 3 (2) ◽  
pp. 113-120
Author(s):  
Aviru Kumar Basu ◽  
Anup Basak ◽  
Shantanu Bhattacharya

SU-8 micro-cantilever arrays consisting of V- and M-shaped structures fabricated using a simplified single hard mask step. Bending tests were performed under similar peak loads (ranging 2–10 µN), with thickness ranging between micron (3.5 µm) and sub-micron (0.2 µm) scales. Various mechanical properties such as stiffness and hysteresis are determined from the load versus deflection curves. When the thickness of the V-shaped beam is decreased from 2 µm to 0.2 µm, the stiffness increases by a factor of 2.7, which is in contradiction with the classical beam theory according to which the stiffness for 0.2 µm beam should be three orders of magnitude less than that of 2 µm beam. Micropolar elasticity theory with a variable-intrinsic length scale (thickness dependant) is used to explain such an anomalous response. Experimentally obtained stiffness of two M-shaped beams of thickness 2 µm and 0.2 µm are almost identical. Reason behind this contradictory result is that the thicker beam has a residual strain with a large plastic deformation which usually increases the cross-linking network density, leading to increase in elastic modulus, hardness and thus stiffness of polymers. But the thinner beam has undergone an elastic deformation. The size effect of V- and M-shaped cantilever beams is discussed.


Meccanica ◽  
2021 ◽  
Author(s):  
A. Sapora ◽  
G. Efremidis ◽  
P. Cornetti

AbstractTwo nonlocal approaches are applied to the borehole geometry, herein simply modelled as a circular hole in an infinite elastic medium, subjected to remote biaxial loading and/or internal pressure. The former approach lies within the framework of Gradient Elasticity (GE). Its characteristic is nonlocal in the elastic material behaviour and local in the failure criterion, hence simply related to the stress concentration factor. The latter approach is the Finite Fracture Mechanics (FFM), a well-consolidated model within the framework of brittle fracture. Its characteristic is local in the elastic material behaviour and non-local in the fracture criterion, since crack onset occurs when two (stress and energy) conditions in front of the stress concentration point are simultaneously met. Although the two approaches have a completely different origin, they present some similarities, both involving a characteristic length. Notably, they lead to almost identical critical load predictions as far as the two internal lengths are properly related. A comparison with experimental data available in the literature is also provided.


2012 ◽  
Vol 185 ◽  
pp. 109-116 ◽  
Author(s):  
Cuong Do ◽  
Maryna Lishchynska ◽  
Kieran Delaney ◽  
Martin Hill

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