Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement

Author(s):  
F.J. Chen ◽  
S.H. Yin ◽  
H. Huang ◽  
H. Ohmori ◽  
Y. Wang ◽  
...  
Author(s):  
Bing Chen ◽  
Shichun Li ◽  
Zhaohui Deng ◽  
Bing Guo ◽  
Qingliang Zhao

2010 ◽  
Vol 97-101 ◽  
pp. 4217-4220 ◽  
Author(s):  
Shao Hui Yin ◽  
Yu Wang ◽  
Yu Feng Fan ◽  
Yong Jian Zhu ◽  
Feng Jun Chen ◽  
...  

This paper reported an experimental study on ultra-precision grinding for micro aspherical lens mould. One-point grinding mode and inclined axis grinding mode are employed and investigated in grinding process. Grinding test of a micro-lens mould using form error compensation technique is conducted. The experimental results show that ground micro aspheric mould surfaces with form (PV) around 0.122 µm and a roughness (Ra) less than 2 nm is achieved successfully.


2010 ◽  
Vol 97-101 ◽  
pp. 2192-2196 ◽  
Author(s):  
Shao Hui Yin ◽  
Hai Feng Li ◽  
Yu Feng Fan ◽  
Yong Jian Zhu ◽  
Feng Jun Chen

In this paper, a new method of improving uniformity of surface roughness through controlling feed rate was proposed. A CNC grinding software based on feed rate controlling and error compensation for aspheric surface was developed. The structure and function of the software system was described. An experimental test for grinding aspheric surface of WC mould was conducted for evaluating the performance of the compensation process by using this developed software. After compensation grinding for several times, form accuracy of PV 126 nm, roughness of Ra 3.4 nm can be obtained.


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