Influence of shallow versus deep etching on dark current and quantum efficiency in InAs/GaSb superlattice photodetectors and focal plane arrays for long wavelength infrared detection

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A. M. Gallagher ◽  
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2010 ◽  
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E. P. G. Smith ◽  
A. M. Gallagher ◽  
T. J. Kostrzewa ◽  
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