Numerical simulation of anisotropic surface diffusion with curvature-dependent energy

2005 ◽  
Vol 203 (2) ◽  
pp. 602-625 ◽  
Author(s):  
Martin Burger
Keyword(s):  
Numerical Simulation ◽  
Surface Diffusion ◽  
Anisotropic Surface

scholarly journals Numerical simulation of surface diffusion motion and its application in MEMS fabrication

2019 ◽  
Vol 1303 ◽  
pp. 012024
Author(s):  
Yujie Zhang ◽  
Fan Zeng ◽  
Man Wong ◽  
Junping Xiang ◽  
Wenjing Ye
Keyword(s):  
Numerical Simulation ◽  
Surface Diffusion ◽  
Mems Fabrication ◽  
Diffusion Motion

Anisotropic surface diffusion of CO on Ni(110)

1991 ◽  
Vol 66 (18) ◽  
pp. 2352-2355 ◽  
Author(s):  
Xu-Dong Xiao ◽  
X. D. Zhu ◽  
W. Daum ◽  
Y. R. Shen
Keyword(s):  
Surface Diffusion ◽  
Anisotropic Surface

Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing

2011 ◽  
Vol 1299 ◽  
Author(s):  
Reiko Hiruta ◽  
Hitoshi Kuribayashi ◽  
Koichi Sudoh ◽  
Ryosuke Shimizu
Keyword(s):  
Surface Diffusion ◽  
Mirror Symmetry ◽  
Morphological Evolution ◽  
Shape Transformation ◽  
Force Microscopy ◽  
Anisotropic Surface ◽  
Atomic Force ◽  
Hole Arrays ◽  
Top View ◽  
Anisotropic Surface Energy

ABSTRACTWe investigated the process of the hole inlet closure in surface-diffusion-driven transformation of arrays of high-aspect-ratio holes on Si(001) substrates. The inlet gradually shrinks while keeping the circular shape because of lateral bulging of the inlet surface. We observed complicated top view morphologies reflecting the four-fold symmetry of the Si(001) surface on the inlet surface. Large {111} and {113} facets are formed in the four equivalent azimuths of the [110], while corrugated patterns arise in the four equivalent azimuths of the [100]. Atomic force microscopy observations reveal that the corrugated pattern is composed of three types of small facets, namely, {110} and two {113} in relation of the mirror symmetry. The corrugated pattern formation is due to the geometrical restriction that there is no stable facet between (001) and (010) in the [010] azimuth. The observed morphological evolution is interpreted as surface-diffusion-driven transformation under constraint of the anisotropic surface energy of Si.

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