A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

2021 ◽  
Vol 58 ◽  
pp. 316-334
Author(s):  
Lihui Wu ◽  
Zhongwei Zhang ◽  
Jie Zhang ◽  
Ray Y. Zhong ◽  
Junliang Wang
Keyword(s):  
Material Handling ◽  
Performance Model ◽  
Wafer Fabrication ◽  
Semiconductor Wafer ◽  
Closed Loops ◽  
Material Handling Systems ◽  
Semiconductor Wafer Fabrication ◽  
Automated Material Handling ◽  
Automated Material Handling Systems ◽  
A Performance
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