Fabrication of bifacial wafer-scale silicon nanowire arrays with ultra-high aspect ratio through controllable metal-assisted chemical etching

2015 ◽  
Vol 139 ◽  
pp. 437-442 ◽  
Author(s):  
Yumin Liu ◽  
Weiwei Sun ◽  
Yun Jiang ◽  
Xing-Zhong Zhao
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Arrays ◽  
Wafer Scale ◽  
Silicon Nanowire Arrays ◽  
Metal Assisted Chemical Etching

scholarly journals Nanowires: Decoupling Diameter and Pitch in Silicon Nanowire Arrays Made by Metal-Assisted Chemical Etching (Adv. Funct. Mater. 1/2014)

2014 ◽  
Vol 24 (1) ◽  
pp. 105-105 ◽  
Author(s):  
Junghoon Yeom ◽  
Daniel Ratchford ◽  
Christopher R. Field ◽  
Todd H. Brintlinger ◽  
Pehr E. Pehrsson
Keyword(s):  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Arrays ◽  
Silicon Nanowire Arrays ◽  
Metal Assisted Chemical Etching

Decoupling Diameter and Pitch in Silicon Nanowire Arrays Made by Metal-Assisted Chemical Etching

2013 ◽  
Vol 24 (1) ◽  
pp. 106-116 ◽  
Author(s):  
Junghoon Yeom ◽  
Daniel Ratchford ◽  
Christopher R. Field ◽  
Todd H. Brintlinger ◽  
Pehr E. Pehrsson
Keyword(s):  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Arrays ◽  
Silicon Nanowire Arrays ◽  
Metal Assisted Chemical Etching

scholarly journals Anisotropic Silicon Nanowire Arrays Fabricated by Colloidal Lithography

2021 ◽  
Author(s):  
Marcel Rey ◽  
Fedja Wendisch ◽  
Eric Goerlitzer ◽  
Josing Tang ◽  
Romina Bader ◽  
...  
Keyword(s):  
High Throughput ◽  
Chemical Etching ◽  
Large Scale ◽  
Silicon Nanowire ◽  
Geometric Parameters ◽  
Nanowire Arrays ◽  
Colloidal Lithography ◽  
Silicon Nanowire Arrays ◽  
Metal Assisted Chemical Etching

The combination of metal-assisted chemical etching (MACE) and colloidal lithography allows for the affordable, large-scale and high-throughput synthesis of silicon nanowire (SiNW) arrays. However, many geometric parameters of these arrays...

Effect of Wettability on the Agglomeration of Silicon Nanowire Arrays Fabricated by Metal-Assisted Chemical Etching

Langmuir ◽  
2014 ◽  
Vol 30 (34) ◽  
pp. 10290-10298 ◽  
Author(s):  
A. S. Togonal ◽  
Lining He ◽  
Pere Roca i Cabarrocas ◽  
Rusli
Keyword(s):  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Arrays ◽  
Silicon Nanowire Arrays ◽  
Metal Assisted Chemical Etching
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