scholarly journals Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation

2021 ◽  
Vol 18 ◽  
pp. 100135
Author(s):  
Yuki Shimizu ◽  
Lue Quan ◽  
Dong Wook Shin ◽  
Hiraku Matsukuma ◽  
Wei Gao
Keyword(s):  
Optical Sensor ◽  
Diffraction Grating ◽  
Sensor Head ◽  
Pitch Deviation

A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector

2017 ◽  
Vol 870 ◽  
pp. 141-146 ◽  
Author(s):  
Yuki Shimizu ◽  
Taiji Maruyama ◽  
So Ito ◽  
Wei Gao
Keyword(s):  
Optical Sensor ◽  
Diffraction Grating ◽  
Angle Sensor ◽  
Sensor Head ◽  
First Order ◽  
Autocollimation Method ◽  
Linear Encoder ◽  
Optical Configuration ◽  
Stage System ◽  
Long Stroke

This paper presents a design study of an optical three-axis angle sensor for measurement of angular error motions of long-stroke precision linear stages. The three-axis angle sensor, which is based on a laser autocollimation method, can detect angular motions about the XYZ-axes simultaneously by using zeroth-and first-order diffraction beams from a diffraction grating mounted on a measuring target as a reflector. In this paper, an optical sensor head is designed in such a way that the three-axis angle sensor shares a diffraction grating with an optical sensor head of a linear encoder, which is already installed in a stage system. The optical sensor head of the three-axis angle sensor is designed in a size of smaller than 50 mm × 30 mm × 30 mm so that the sensor head can be compatible with the linear encoder. Details of the optical configuration designed for the sensor head, and some results of experiments are reported.

Dual-technology optical sensor head for 3D surface shape measurements on the micro- and nanoscales

2004 ◽  
Author(s):  
Roger Artigas ◽  
Ferran Laguarta ◽  
Cristina Cadevall
Keyword(s):  
Optical Sensor ◽  
Surface Shape ◽  
Sensor Head ◽  
3D Surface

A Refractometer with a Fully Packaged Integrated Optical Sensor Head

1989 ◽  
pp. 443-447 ◽  
Author(s):  
W. Konz ◽  
A. Brandenburg ◽  
R. Edelhäuser ◽  
W. Ott ◽  
H. Wölfelschneider
Keyword(s):  
Optical Sensor ◽  
Sensor Head ◽  
Integrated Optical ◽  
Integrated Optical Sensor

Optical Sensor Based on Vernier-Cascade of Ring Resonator and Echelle Diffraction Grating

2012 ◽  
Vol 24 (11) ◽  
pp. 954-956 ◽  
Author(s):  
Li Qin ◽  
Lei Wang ◽  
Mingyu Li ◽  
Jian-Jun He
Keyword(s):  
Optical Sensor ◽  
Diffraction Grating ◽  
Ring Resonator

The Smart Panoramic Optical Sensor Head (SPOSH)—A camera for observations of transient luminous events on planetary night sides

2011 ◽  
Vol 59 (1) ◽  
pp. 1-9 ◽  
Author(s):  
J. Oberst ◽  
J. Flohrer ◽  
S. Elgner ◽  
T. Maue ◽  
A. Margonis ◽  
...  
Keyword(s):  
Optical Sensor ◽  
Sensor Head ◽  
Transient Luminous Events

Surface Encoders for a Mosaic Scale Grating

2011 ◽  
Vol 5 (2) ◽  
pp. 91-96 ◽  
Author(s):  
Koji Hosono ◽  
◽  
WooJae Kim ◽  
Akihide Kimura ◽  
Yuki Shimizu ◽  
...  
Keyword(s):  
Optical Sensor ◽  
Measurement Range ◽  
Sensor Head ◽  
Basic Experiments

The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder’s measurement range in plane - in the X and Y directions. The mosaic XY-axis scale grating we use to expand the measurement range in plane consists of multiple XY-axis scale gratings arranged in plane. We present two optical configurations for the mosaic XY-axis scale grating. To confirm our configurations’ effectiveness, we fabricated two prototypes that we tested in basic experiments using a mosaic single-axis scale grating.

Sensing of Decomposition Products in SF6by Use of a Corner Cube Prism Coated with a Dye Film as an Optical Sensor Head

1997 ◽  
Vol 36 (Part 1, No. 7A) ◽  
pp. 4517-4520 ◽  
Author(s):  
Marenori Kawamura ◽  
Koichi Ishii ◽  
Susumu Sato
Keyword(s):  
Optical Sensor ◽  
Decomposition Products ◽  
Sensor Head ◽  
Corner Cube ◽  
Corner Cube Prism
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