Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films

2008 ◽  
Vol 85 (3) ◽  
pp. 527-533 ◽  
Author(s):  
D. Schmidt ◽  
S. Strehle ◽  
M. Albert ◽  
W. Hentsch ◽  
J.W. Bartha
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

Real time characterization of hydrogenation mechanism of palladium thin films by in situ spectroscopic ellipsometry

2009 ◽  
Vol 106 (1) ◽  
pp. 013523 ◽  
Author(s):  
Y. Yamada ◽  
K. Tajima ◽  
S. Bao ◽  
M. Okada ◽  
A. Roos ◽  
...  
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry

Optical characterization of CuIn1−xGaxSe2 alloy thin films by spectroscopic ellipsometry

2003 ◽  
Vol 94 (2) ◽  
pp. 879-888 ◽  
Author(s):  
P. D. Paulson ◽  
R. W. Birkmire ◽  
W. N. Shafarman
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Characterization

scholarly journals In Situ Lorentz Differential Phase Contrast STEM Characterization of Rashba Interaction on Skyrmion Thin Films

2018 ◽  
Vol 24 (S1) ◽  
pp. 1900-1901
Author(s):  
B. D. Esser ◽  
A. S. Ahmed ◽  
K. Meng ◽  
J. Rowland ◽  
M. Randeria ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Contrast ◽  
Differential Phase ◽  
Rashba Interaction ◽  
Differential Phase Contrast

Characterization of SiN thin films with spectroscopic ellipsometry

1993 ◽  
Vol 185 (1-4) ◽  
pp. 342-347 ◽  
Author(s):  
J. Petalas ◽  
S. Logothetidis ◽  
A. Markwitz ◽  
E.C. Paloura ◽  
R.L. Johnson ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

In situ structural characterization of picene thin films by X-ray scattering: Vacuum versus O2 atmosphere

2012 ◽  
Vol 544 ◽  
pp. 34-38 ◽  
Author(s):  
T. Hosokai ◽  
A. Hinderhofer ◽  
A. Vorobiev ◽  
C. Lorch ◽  
T. Watanabe ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Characterization ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Spectroscopic ellipsometry characterization of Er3+-dopedtitania thin films prepared by the sol-gel method

Optik ◽  
2001 ◽  
Vol 112 (7) ◽  
pp. 316-320 ◽  
Author(s):  
R. Palomino-Merino ◽  
A. Mendoza-Galván ◽  
G. Martínez ◽  
V. Castaño ◽  
R. Rodríguez
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Sol Gel ◽  
Gel Method ◽  
Sol Gel Method
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