A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition

2021 ◽  
Vol 237 ◽  
pp. 111493
Author(s):  
Andressa Macedo Rosa ◽  
Alessandra Leonhardt ◽  
Laís Oliveira de Souza ◽  
Lucas Petersen Barbosa Lima ◽  
Marcos Vinicius Puydinger dos Santos ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Silicon Nanowire ◽  
Double Patterning ◽  
Focused Ion Beam Milling

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2012 ◽  
Vol 132 (1) ◽  
pp. 99-106
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Bin Tian ◽  
Lianying Zou ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

A study of angular effects in focused ion beam milling of water ice

2008 ◽  
Vol 18 (9) ◽  
pp. 095010 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B Joshi ◽  
Jeffrey M Catchmark
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Ice ◽  
Focused Ion Beam Milling

Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2013 ◽  
Vol 13 (8) ◽  
pp. 5542-5546 ◽  
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Lianying Zou ◽  
Bin Tian ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Quantitative off-axis electron holography of GaAsp-njunctions prepared by focused ion beam milling

2009 ◽  
Vol 233 (1) ◽  
pp. 102-113 ◽  
Author(s):  
D. COOPER ◽  
R. TRUCHE ◽  
A.C. TWITCHETT-HARRISON ◽  
R.E. DUNIN-BORKOWSKI ◽  
P.A. MIDGLEY
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Electron Holography ◽  
Focused Ion Beam Milling

Study and formation of 2D microstructures of sapphire by focused ion beam milling

2008 ◽  
Vol 85 (3) ◽  
pp. 640-645 ◽  
Author(s):  
Tao Dai ◽  
Xiangning Kang ◽  
Bei Zhang ◽  
Jun Xu ◽  
Kui Bao ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Low energy focused ion beam milling of silicon and germanium nanostructures

2011 ◽  
Vol 22 (10) ◽  
pp. 105304 ◽  
Author(s):  
Miroslav Kolíbal ◽  
Tomáš Matlocha ◽  
Tomáš Vystavěl ◽  
Tomáš Šikola
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Silicon And Germanium ◽  
Focused Ion Beam Milling
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