MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements
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2004 ◽
Vol 2004
(0)
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pp. 64-69
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2007 ◽
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2003 ◽
Vol 2003
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pp. 245-246
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2007 ◽
Vol 73
(730)
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pp. 1862-1868
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