A method for simultaneously measuring 6DOF geometric motion errors of a precision rotary stage based on absolute position-distance measurement

2021 ◽  
Vol 138 ◽  
pp. 106420
Author(s):  
Wenjun Yang ◽  
Xiaojun Liu ◽  
Xiaoting Guo ◽  
Wenlong Lu ◽  
Zhenjian Yao ◽  
...  
1995 ◽  
Vol 20 (7) ◽  
pp. 785 ◽  
Author(s):  
Tianchu Li ◽  
Anbo Wang ◽  
Kent Murphy ◽  
Richard Claus

2015 ◽  
Vol 135 (11) ◽  
pp. 1349-1350
Author(s):  
Kazuhiro Suzuki ◽  
Noboru Nakasako ◽  
Masato Nakayama ◽  
Toshihiro Shinohara ◽  
Tetsuji Uebo

Author(s):  
Zhi-Bin Zhou ◽  
Jong-Wook Kwon ◽  
Bo Zhang ◽  
Min-Kyo Seo

2014 ◽  
Vol 39 (4) ◽  
pp. 440-444
Author(s):  
Yan-li TONG ◽  
Pin JIANG ◽  
Ya-hui LUO ◽  
Wen-wu HU ◽  
Ning-xiang DAI ◽  
...  
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document