Multi-parameter identification of gratings measurement by Experimental Ray Tracing

A simple method for measuring grating groove density as well as its position and orientation is proposed based on the idea of ERT (Experimental Ray Tracing). Conventional methods only measure grating groove density with accuracy limited by its rotary stage and goniometer. The method proposed in the paper utilizes linear guides which could be calibrated to much higher accuracy. It is applicable to gratings of arbitrary surface profile or mosaic of a group of various gratings. Various measurement error sources are simulated by the Monte Carlo method and the results show high accuracy capability of grating parameters identification. A verification testing is performed. The accuracy dependency on main configuration parameters is evaluated. A method to expand measurement range by double wavelength is also discussed.

Laser R-Test for Angular Positioning Calibration and Compensation of the Five-Axis Machine Tools

The angular positioning error of the rotary stage causes low quality in milling various angles of a workpiece. This study proposes a solution that could improve these issues by using our Laser R-test for angular positioning calibration and compensation of the five-axis machine tools in compliance with the simultaneous measurement path of ISO regulations: ISO 10791-6 and ISO 230-2. System uncertainty analysis and calibration were implemented for system prediction. The measurement method proposed in this paper could solve concentricity problems between measurement devices and the rotary table by applying the Cosine theorem with a Cartesian coordinate system. Further, we used the commercial instrument XR20-W (Renishaw, UK) rotary axis calibrator to verify and compare the measured results on a CNC machine tool. The applied system achieves an angular error of 0.0121 degrees for actual workpieces and is smaller than the referring commercial system, which achieves an error of about 0.0022 degrees. The system in this research is useful for five-axis machine tool full calibrations.

Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable part geometries. An enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer range. For this purpose, a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate substructures. Evaluations taken show high potential for three linear movements of the object in combination with two angular movements of the tool. The influence of the additional rotation systems on the existing structure of NPMMs has been investigated further on. Test series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are realized. As a result of these test series, the necessity of in situ position determination of the tool became very clear. The tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry–Pérot interferometers. FEA optimization has been used to enhance the overall system structure with regard to reproducibility and long-term stability. Results have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the NPMM. The knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.

3D infrared thermospectroscopic imaging

This work reports a multispectral tomography technique in transmission mode (called 3DITI for 3D Infrared Thermospectroscopic Imaging) based on a middle wavelength infrared (MWIR) focal plane array. This technique relies on an MWIR camera (1.5 to 5.5 μm) used in combination with a multispectral IR monochromator (400 nm to 20 μm), and a sample mounted on a rotary stage for the measurement of its transmittance at several angular positions. Based on the projections expressed in terms of a sinogram, spatial three-dimensional (3D) cubes (proper emission and absorptivity) are reconstructed using a back-projection method based on inverse Radon transform. As a validation case, IR absorptivity tomography of a reflective metallic screw is performed within a very short time, i.e., shorter than 1 min, to monitor 72 angular positions of the sample. Then, the absorptivity and proper emission tomographies of a butane-propane-air burner flame and microfluidic perfluoroalkoxy (PFA) tubing filled with water and ethanol are obtained. These unique data evidence that 3D thermo-chemical information in complex semi-transparent media can be obtained using the proposed 3DITI method. Moreover, this measurement technique presents new problems in the acquisition, storage and processing of big data. In fact, the quantity of reconstructed data can reach several TB (a tomographic sample cube of 1.5 × 1.5 × 3 cm3 is composed of more than 1 million pixels per wavelength).