A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables

2010 ◽  
Vol 34 (1) ◽  
pp. 43-48 ◽  
Author(s):  
Tomonori Kato ◽  
Kenji Kawashima ◽  
Tatsuya Funaki ◽  
Kotaro Tadano ◽  
Toshiharu Kagawa
Keyword(s):  
Active Control ◽  
High Precision ◽  
Vibration Isolation ◽  
Quick Response ◽  
Pressure Regulator ◽  
Response Pressure

scholarly journals Active vibration isolation of high precision machines

2010 ◽  
Vol 1 (MEDSI-6) ◽  
Author(s):  
C. Collette ◽  
S. Janssens ◽  
K. Artoos ◽  
C. Hauviller
Keyword(s):  
Active Control ◽  
High Precision ◽  
Vibration Isolation ◽  
Control Strategies ◽  
External Disturbances ◽  
Single Degree Of Freedom ◽  
Single Degree ◽  
Atomic Force ◽  
Active Vibration ◽  
Precision Machines

This paper provides a review of active control strategies used to isolate high-precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.

scholarly journals Rotation Control of Air Turbine Spindle using High Precision, Quick Response Pneumatic Pressure Regulator

2014 ◽  
Vol 7 (1) ◽  
pp. 9-15 ◽  
Author(s):  
Tomonori KATO ◽  
Genki HIGASHIJIMA ◽  
Takanori YAZAWA ◽  
Tatsuki OTUBO ◽  
Yusuke NOZAKI ◽  
...  
Keyword(s):  
High Precision ◽  
Quick Response ◽  
Pressure Regulator ◽  
Pneumatic Pressure ◽  
Air Turbine

scholarly journals Rotation Control of Air Turbine Spindle using High Precision, Quick Response Pneumatic Pressure Regulator

2014 ◽  
Vol 45 (1) ◽  
pp. 8-14
Author(s):  
Tomonori KATO ◽  
Genki HIGASHIJIMA ◽  
Takanori YAZAWA ◽  
Tatsuki OTUBO ◽  
Yusuke NOZAKI ◽  
...  
Keyword(s):  
High Precision ◽  
Quick Response ◽  
Pressure Regulator ◽  
Pneumatic Pressure ◽  
Air Turbine
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