Active vibration isolation of high precision machines
2010 ◽
Vol 1
(MEDSI-6)
◽
Keyword(s):
This paper provides a review of active control strategies used to isolate high-precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.
1998 ◽
Vol 120
(1)
◽
pp. 104-110
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2009 ◽
Vol 223
(11)
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pp. 1395-1403
2010 ◽
Vol 34
(1)
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pp. 43-48
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Keyword(s):
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2013 ◽
Vol 416-417
◽
pp. 860-865
1985 ◽
Vol 107
(1)
◽
pp. 33-37
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1997 ◽
Vol 25
(3)
◽
pp. 165-175
Keyword(s):
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