Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining
2014 ◽
Vol 38
(4)
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pp. 809-820
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2013 ◽
Vol 853
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pp. 477-481
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2011 ◽
Vol 131
(7)
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pp. 967-973
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Keyword(s):
2009 ◽
Vol 129
(12)
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pp. 1137-1146
Keyword(s):
2009 ◽
Vol 129
(4)
◽
pp. 415-422
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2014 ◽
Vol 7
(4)
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pp. 134