scholarly journals None Hazardous Chemical Method for Etching Thin Film Silicon Nitride Using Aqueous Solutions of Chelating Agents

2015 ◽  
Vol 120 ◽  
pp. 1107-1110 ◽  
Author(s):  
Miron Kropp ◽  
Walter Lang
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Aqueous Solutions ◽  
Chemical Method ◽  
Chelating Agents ◽  
Hazardous Chemical ◽  
Thin Film Silicon

The elastic properties of thin-film silicon nitride

2002 ◽  
Author(s):  
T.S. Hickernell ◽  
F.M. Fliegel ◽  
F.S. Hickernell
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Elastic Properties ◽  
Thin Film Silicon

scholarly journals Spectroscopic ellipsometry characterization of thin-film silicon nitride

1998 ◽  
Vol 313-314 ◽  
pp. 193-197 ◽  
Author(s):  
G.E. Jellison, Jr ◽  
F.A. Modine ◽  
P. Doshi ◽  
A. Rohatgi
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Spectroscopic Ellipsometry ◽  
Thin Film Silicon

Comparison of tensile and bulge tests for thin-film silicon nitride

2004 ◽  
Vol 44 (1) ◽  
pp. 49-54 ◽  
Author(s):  
R. L. Edwards ◽  
G. Coles ◽  
W. N. Sharpe
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Thin Film Silicon

Conformal thin-film silicon nitride deposited by hot-wire chemical vapor deposition

2004 ◽  
Vol 84 (3) ◽  
pp. 338-340 ◽  
Author(s):  
Qi Wang ◽  
Scott Ward ◽  
Lynn Gedvilas ◽  
Brian Keyes ◽  
Errol Sanchez ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Silicon Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Thin Film Silicon
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