Characteristics of tantalum nitride thin film strain gauges for harsh environments

2007 ◽  
Vol 135 (2) ◽  
pp. 355-359 ◽  
Author(s):  
Gwiy-Sang Chung
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Harsh Environments ◽  
Strain Gauges ◽  
Tantalum Nitride Thin Film

scholarly journals Fabrication and Characteristics of Tantalum Nitride Thin-Film Strain Gauges

2004 ◽  
Vol 13 (4) ◽  
pp. 303-308
Author(s):  
Gwiy-Sang Chung ◽  
Hyung-Soon Woo ◽  
Sun-Chul Kim ◽  
Dae-Sun Hong
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Strain Gauges ◽  
Tantalum Nitride Thin Film

scholarly journals Evaluation of Characteristics of a Tantalum-Nitride Thin Film Resistor on an AlN Submount.

2002 ◽  
Vol 68 (8) ◽  
pp. 1052-1056 ◽  
Author(s):  
Teruhisa AKASHI ◽  
Hideaki TAKEMORI ◽  
Tetsuya TOMOBE ◽  
Toshiaki KOIZUMI
Keyword(s):  
Thin Film ◽  
Tantalum Nitride ◽  
Film Resistor ◽  
Thin Film Resistor ◽  
Tantalum Nitride Thin Film
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