Fabrication of a low resistivity tantalum nitride thin film

Microelectronic Engineering ◽

10.1016/j.mee.2005.08.006 ◽

2006 ◽

Vol 83 (2) ◽

pp. 206-212 ◽

Author(s):

Hong Shen ◽

Ravi Ramanathan

Keyword(s):

Thin Film ◽

Tantalum Nitride ◽

Low Resistivity ◽

Tantalum Nitride Thin Film

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Fabrication of Tantalum nitride thin film using the low vacuum magnetron sputtering system

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/18/9/092032 ◽

2011 ◽

Vol 18 (9) ◽

pp. 092032 ◽

Author(s):

Takashi Hashizume ◽

Atsushi Saiki ◽

Kiyoshi Terayama

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Tantalum Nitride ◽

Tantalum Nitride Thin Film ◽

Sputtering System

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Tantalum nitride thin film resistors with low TCR

Microelectronics Reliability ◽

10.1016/0026-2714(71)90281-2 ◽

1971 ◽

Vol 10 (4) ◽

pp. 256

Keyword(s):

Thin Film ◽

Tantalum Nitride ◽

Thin Film Resistors ◽

Tantalum Nitride Thin Film

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A critical evaluation of tantalum nitride thin film resistors

Microelectronics Reliability ◽

10.1016/0026-2714(65)90060-0 ◽

1965 ◽

Vol 4 (2) ◽

pp. 229

Keyword(s):

Thin Film ◽

Critical Evaluation ◽

Tantalum Nitride ◽

Thin Film Resistors ◽

Tantalum Nitride Thin Film

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Performance evaluation of tantalum nitride thin film hard coated K20 carbide insert on machining Inconel 600

International Technology and Innovation Conference 2006 (ITIC 2006) ◽

10.1049/cp:20061050 ◽

2006 ◽

Author(s):

S. Parthasarathy ◽

G. Srikrishna ◽

J. Rohit Fernando ◽

N. Muthukrishnan

Keyword(s):

Thin Film ◽

Performance Evaluation ◽

Tantalum Nitride ◽

Inconel 600 ◽

Tantalum Nitride Thin Film ◽

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Processing and performance of tantalum nitride thin film resistor networks with ±50 ppm/°C TCR

Microelectronics Reliability ◽

10.1016/0026-2714(74)90193-0 ◽

1974 ◽

Vol 13 (1) ◽

pp. 18-19

Keyword(s):

Thin Film ◽

Tantalum Nitride ◽

Film Resistor ◽

Thin Film Resistor ◽

Resistor Networks ◽

And Performance ◽

Tantalum Nitride Thin Film

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Processing and Performance of Tantalum Nitride Thin Film Resistor Networks with ±50 Ppm/°C TCR

IEEE Transactions on Parts Hybrids and Packaging ◽

10.1109/tphp.1973.1136721 ◽

1973 ◽

Vol 9 (3) ◽

pp. 155-160 ◽

Author(s):

W. Ostrander ◽

J. Verhoef ◽

L. Bos

Keyword(s):

Thin Film ◽

Tantalum Nitride ◽

Film Resistor ◽

Thin Film Resistor ◽

Resistor Networks ◽

And Performance ◽

Tantalum Nitride Thin Film

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Evaluation of Characteristics of a Tantalum-Nitride Thin Film Resistor on an AlN Submount.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.68.1052 ◽

2002 ◽

Vol 68 (8) ◽

pp. 1052-1056 ◽

Author(s):

Teruhisa AKASHI ◽

Hideaki TAKEMORI ◽

Tetsuya TOMOBE ◽

Toshiaki KOIZUMI

Keyword(s):

Thin Film ◽

Tantalum Nitride ◽

Film Resistor ◽

Thin Film Resistor ◽

Tantalum Nitride Thin Film

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Atomic Layer Deposition Stacked Tantalum Nitride Thin Film Resistor

ECS Meeting Abstracts ◽

10.1149/ma2005-02/12/477 ◽

2005 ◽

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Tantalum Nitride ◽

Film Resistor ◽

Thin Film Resistor ◽

Layer Deposition ◽

Tantalum Nitride Thin Film

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Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system

Vacuum ◽

10.1016/0042-207x(85)90018-1 ◽

1985 ◽

Vol 35 (2) ◽

pp. 79-81 ◽

Author(s):

S Dontchev ◽

P Georgiev ◽

K Gerassimova ◽

J Kourtev

Keyword(s):

Thin Film ◽

Spectroscopic Investigation ◽

Reactive Sputtering ◽

Thin Film Deposition ◽

Film Deposition ◽

Tantalum Nitride ◽

Tantalum Nitride Thin Film

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A silicon optical bench incorporating a tantalum-nitride thin-film resistor

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/14/2/017 ◽

2003 ◽

Vol 14 (2) ◽

pp. 283-289 ◽

Author(s):

T Akashi ◽

S Higashiyama ◽

H Takemori ◽

T Koizmi

Keyword(s):

Thin Film ◽

Tantalum Nitride ◽

Optical Bench ◽

Film Resistor ◽

Thin Film Resistor ◽

Tantalum Nitride Thin Film

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