A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift
2011 ◽
Vol 167
(2)
◽
pp. 495-501
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2003 ◽
Vol 14
(1)
◽
pp. 147-152
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Keyword(s):
Keyword(s):
2018 ◽
Vol 2
(9)
◽
pp. 1716-1719
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Keyword(s):
Keyword(s):