Influence of deposition pressure on the structure and properties of fluorinated diamond-like carbon films prepared by RF reactive magnetron sputtering

2006 ◽  
Vol 200 (12-13) ◽  
pp. 3682-3686 ◽  
Author(s):  
Meifu Jiang ◽  
Zhaoyuan Ning
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Reactive Magnetron Sputtering ◽  
Diamond Like Carbon ◽  
Reactive Magnetron ◽  
Structure And Properties ◽  
Deposition Pressure

Structure of diamond-like carbon films containing transition metals deposited by reactive magnetron sputtering

2005 ◽  
Vol 14 (3-7) ◽  
pp. 1103-1107 ◽  
Author(s):  
C. Corbella ◽  
G. Oncins ◽  
M.A. Gómez ◽  
M.C. Polo ◽  
E. Pascual ◽  
...  
Keyword(s):  
Transition Metals ◽  
Magnetron Sputtering ◽  
Carbon Films ◽  
Reactive Magnetron Sputtering ◽  
Diamond Like Carbon ◽  
Reactive Magnetron

Composition and morphology of metal-containing diamond-like carbon films obtained by reactive magnetron sputtering

2005 ◽  
Vol 482 (1-2) ◽  
pp. 293-298 ◽  
Author(s):  
C. Corbella ◽  
E. Pascual ◽  
G. Oncins ◽  
C. Canal ◽  
J.L. Andújar ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Reactive Magnetron Sputtering ◽  
Diamond Like Carbon ◽  
Reactive Magnetron
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