Influence of the addition of silicon on the structure and properties of chromium nitride coatings deposited by reactive magnetron sputtering assisted by RF plasmas

2007 ◽  
Vol 201 (16-17) ◽  
pp. 6970-6976 ◽  
Author(s):  
D. Mercs ◽  
P. Briois ◽  
V. Demange ◽  
S. Lamy ◽  
C. Coddet
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Chromium Nitride ◽  
Reactive Magnetron ◽  
Structure And Properties ◽  
Rf Plasmas ◽  
Nitride Coatings

The structure and properties of chromium nitride coatings deposited using dc, pulsed dc and modulated pulse power magnetron sputtering

2010 ◽  
Vol 204 (14) ◽  
pp. 2230-2239 ◽  
Author(s):  
Jianliang Lin ◽  
John J. Moore ◽  
William D. Sproul ◽  
Brajendra Mishra ◽  
Zhili Wu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Pulse Power ◽  
Chromium Nitride ◽  
Structure And Properties ◽  
Pulsed Dc ◽  
Nitride Coatings
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