Morphology, structure and properties of diamond-like carbon films prepared by spin coating and RF magnetron sputtering

Materials Technology ◽

10.1080/10667857.2016.1191149 ◽

2016 ◽

Vol 31 (sup1) ◽

pp. 10-16 ◽

Author(s):

Ho Chang ◽

Yo-Shin Lai

Keyword(s):

Magnetron Sputtering ◽

Spin Coating ◽

Rf Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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Influence of Ne sputtering gas on structure and properties of diamond-like carbon films deposited by pulsed-magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2017.02.009 ◽

2017 ◽

Vol 625 ◽

pp. 163-167 ◽

Author(s):

Wei Dai ◽

Xiang Gao ◽

Qimin Wang ◽

Aijiao Xu

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties ◽

Pulsed Magnetron

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Optical Properties of Diamond-like Carbon Films for Antireflection Coating by RF Magnetron Sputtering Method

Physics Procedia ◽

10.1016/j.phpro.2011.06.055 ◽

2011 ◽

Vol 18 ◽

pp. 46-50 ◽

Author(s):

C.R. Lin ◽

D.H. Wei ◽

C.K. Chang ◽

W.H. Liao

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Antireflection Coating ◽

Carbon Films ◽

Diamond Like Carbon

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Influence of deposition pressure on the structure and properties of fluorinated diamond-like carbon films prepared by RF reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.03.023 ◽

2006 ◽

Vol 200 (12-13) ◽

pp. 3682-3686 ◽

Author(s):

Meifu Jiang ◽

Zhaoyuan Ning

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Reactive Magnetron Sputtering ◽

Diamond Like Carbon ◽

Reactive Magnetron ◽

Structure And Properties ◽

Deposition Pressure

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Effect of target self-bias voltage on the mechanical properties of diamond-like carbon films deposited by RF magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2004.04.006 ◽

2004 ◽

Vol 468 (1-2) ◽

pp. 149-154 ◽

Author(s):

S. Chowdhury ◽

M.T. Laugier ◽

I.Z. Rahman

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Bias Voltage ◽

Rf Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

Acta Physica Sinica ◽

10.7498/aps.54.4944 ◽

2005 ◽

Vol 54 (10) ◽

pp. 4944

Author(s):

Yang Wu-Bao ◽

Fan Song-Hua ◽

Zhang Gu-Ling ◽

Ma Pei-Ning ◽

Zhang Shou-Zhong ◽

...

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1575231 ◽

2003 ◽

Vol 21 (4) ◽

pp. 851-859 ◽

Author(s):

E. Broitman ◽

N. Hellgren ◽

Zs. Czigány ◽

R. D. Twesten ◽

J. Luning ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Direct Current ◽

Carbon Films ◽

Diamond Like Carbon ◽

Direct Current Magnetron Sputtering

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Investigation on anti-reflection property of nitrogen doped diamond-like carbon (DLC) films produced by RF magnetron sputtering

Molecular Crystals and Liquid Crystals ◽

10.1080/713738805 ◽

2002 ◽

Vol 386 (1) ◽

pp. 61-66

Author(s):

P. R. Vinod ◽

H. Kakiuchi ◽

T. Terai ◽

A. N. Itakura ◽

M. Kitajima

Keyword(s):

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Diamond Like Carbon ◽

Nitrogen Doped ◽

Reflection Property

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Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2012.10.082 ◽

2013 ◽

Vol 264 ◽

pp. 625-632 ◽

Author(s):

Hideki Nakazawa ◽

Soushi Miura ◽

Ryosuke Kamata ◽

Saori Okuno ◽

Maki Suemitsu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Diamond Like Carbon ◽

Structure And Properties

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Synthesis of hard diamond-like carbon films by double-pulse high-power impulse magnetron sputtering

Diamond and Related Materials ◽

10.1016/j.diamond.2020.107996 ◽

2020 ◽

Vol 108 ◽

pp. 107996 ◽

Author(s):

Takashi Kimura ◽

Kento Sakai

Keyword(s):

Magnetron Sputtering ◽

Carbon Films ◽

Double Pulse ◽

Diamond Like Carbon

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Mechanical Properties and Atomic Structure of Diamond-Like-Carbon Films Fabricated by Unbalanced Magnetron Sputtering

Journal of Solid Mechanics and Materials Engineering ◽

10.1299/jmmp.3.336 ◽

2009 ◽

Vol 3 (2) ◽

pp. 336-346 ◽

Author(s):

Shinji FUJIMOTO ◽

Naoto OHTAKE

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Atomic Structure ◽

Carbon Films ◽

Diamond Like Carbon ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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