Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy

2006 ◽  
Vol 200 (22-23) ◽  
pp. 6185-6189 ◽  
Author(s):  
R. Escobar Galindo ◽  
E. Forniés ◽  
J.M. Albella
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Multilayer Coatings ◽  
Radio Frequency Glow Discharge ◽  
Compositional Depth Profiling ◽  
Profiling Analysis

Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

2002 ◽  
Vol 373 (7) ◽  
pp. 656-663 ◽  
Author(s):  
Kenneth R. Marcus ◽  
Alwyn B. Anfone ◽  
Wandee Luesaiwong ◽  
Teresa A. Hill ◽  
Dvora Perahia ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge

scholarly journals Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

2016 ◽  
Vol 31 (11) ◽  
pp. 2207-2212 ◽  
Author(s):  
C. Schubert ◽  
V. Hoffmann ◽  
A. Kümmel ◽  
J. Sinn ◽  
M. Härtel ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Diamond Like Carbon ◽  
Compositional Depth Profiling

This article describes the compositional depth profiling (CDP) of diamond-like carbon (DLC) layers by Glow Discharge-Optical Emission Spectrometry (GD-OES).

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