Focussing and defocussing effects at radio frequency glow discharge optical emission spectroscopy analyses of thin films with partly nonconductive components

2005 ◽  
Vol 96 (9) ◽  
pp. 983-987 ◽  
Author(s):  
Volker Hoffmann ◽  
Michael Hecker ◽  
René Hübner
Keyword(s):  
Thin Films ◽  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge

Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

2002 ◽  
Vol 373 (7) ◽  
pp. 656-663 ◽  
Author(s):  
Kenneth R. Marcus ◽  
Alwyn B. Anfone ◽  
Wandee Luesaiwong ◽  
Teresa A. Hill ◽  
Dvora Perahia ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge

scholarly journals Evaluation of Boron Solubility in Iron Solid Solution by Radio-frequency Glow-discharge Optical Emission Spectroscopy

2020 ◽  
Vol 106 (6) ◽  
pp. 292-301
Author(s):  
Nobuaki Sekido ◽  
Yuta Kimura ◽  
Takumi Osanai ◽  
Toshimi Miyagi ◽  
Hiroshi Numakura ◽  
...  
Keyword(s):  
Solid Solution ◽  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge
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