Characterization of sp2/sp3 Hybridization Ratios of Hydrogenated Amorphous Carbon Films deposited in C2H2 Inductively Coupled Plasmas
2019 ◽
Vol 40
(1)
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pp. 387-406
1991 ◽
Vol 139
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pp. 334-388
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2019 ◽
Vol 96
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pp. 74-84
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1993 ◽
Vol 86
(8)
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pp. 489-491
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