Electrical properties of B-doped polycrystalline silicon thin films prepared by rapid thermal chemical vapour deposition

2006 ◽  
Vol 497 (1-2) ◽  
pp. 157-162 ◽  
Author(s):  
Bin Ai ◽  
Hui Shen ◽  
Zongcun Liang ◽  
Zhi Chen ◽  
Guanglin Kong ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Thin Films

Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition

2004 ◽  
Vol 455-456 ◽  
pp. 112-115
Author(s):  
Luís Pereira ◽  
Hugo Águas ◽  
Leandro Raniero ◽  
Rui Miguel S. Martins ◽  
Elvira Fortunato ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Polycrystalline Silicon ◽  
Growth Process ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Silicon Thin Films ◽  
Pressure Chemical
Sign in / Sign up

Export Citation Format

Share Document