Experimental analysis and finite element modelling of nano-scratch test applied on 40–120nm SiCN thin films deposited on Cu/Si substrate

2010 ◽  
Vol 518 (14) ◽  
pp. 3859-3865 ◽  
Author(s):  
S. Roy ◽  
E. Darque-Ceretti ◽  
E. Felder ◽  
F. Raynal ◽  
I. Bispo
Keyword(s):  
Thin Films ◽  
Finite Element ◽  
Experimental Analysis ◽  
Finite Element Modelling ◽  
Scratch Test ◽  
Si Substrate ◽  
Element Modelling ◽  
Sicn Thin Films ◽  
Nano Scratch Test

Relaxation in Sub-Micron Si-1-xGex Strain-Layer Mesas

1991 ◽  
Vol 239 ◽  
Author(s):  
Dawei Luo ◽  
David J. Howard ◽  
David C. Paine
Keyword(s):  
Finite Element ◽  
Finite Element Modelling ◽  
Strain Energy ◽  
Critical Thickness ◽  
Thick Layer ◽  
Si Substrate ◽  
Misfit Stress ◽  
Plan View ◽  
Element Modelling ◽  
Strain Layer

ABSTRACTFinite element modelling of strain-layer mesa structures shows that edge effects can contribute to the relaxation of in-plane misfit stress. Calculations were performed for a 200 nm thick layer of Si90Ge10 grown epitaxially on an <001> Si substrate which was patterned into 400-nm-high mesas ranging in diameter from 0.6 to 7 μm. These calculations were experimentally investigated using plan-view TEM to study relaxation in patterned and unpatterned material. This composition and film thickness exceeds the critical thickness predicted using simple strain energy considerations. In one experiment, an initially defect-free 200-nm-thick Si90Ge10 layer was annealed at 960°C for 1 hr to create a nearly fully relaxed layer which was then lithographically patterned into an array of sub-micron mesas. The wafer was then annealed for a second time and changes in the character of die pre-existing dislocations were studied.

Finite element modelling of giant magnetostriction in thin films

1995 ◽  
Vol 31 (6) ◽  
pp. 3563-3565 ◽  
Author(s):  
M.E.M. Benbouzid ◽  
C. Body ◽  
G. Reyne ◽  
C. Meunier
Keyword(s):  
Thin Films ◽  
Finite Element ◽  
Finite Element Modelling ◽  
Element Modelling ◽  
Giant Magnetostriction
Sign in / Sign up

Export Citation Format

Share Document