sicn thin films
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scholarly journals Study on Photoelectricity Properties of SiCN Thin Films Prepared by Magnetron Sputtering

2021 ◽  
Author(s):  
Qiang Li ◽  
Cheng Chen ◽  
Mingge Wang ◽  
Yaohui Lv ◽  
Yulu Mao ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Sicn Thin Films

Characteristics of carbon-containing low-k dielectric SiCN thin films deposited via remote plasma atomic layer deposition

2021 ◽  
Vol 39 (4) ◽  
pp. 042404
Author(s):  
Chanwon Jung ◽  
Seokhwi Song ◽  
Hyunwoo Park ◽  
Youngjoon Kim ◽  
Eun Jong Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Sicn Thin Films ◽  
Low K

scholarly journals Effect of nitrogen flow rate on the mechanical properties of CVD-deposited SiCN thin films

2019 ◽  
Vol 42 (5) ◽  
Author(s):  
Dhruva Kumar ◽  
Ranjan Kr Ghadai ◽  
Soham Das ◽  
Ashis Sharma ◽  
Bibhu P Swain
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Flow Rate ◽  
Nitrogen Flow ◽  
Nitrogen Flow Rate ◽  
Sicn Thin Films

scholarly journals On the Importance of Combined Scratch/Acoustic Emission Test Evaluation: SiC and SiCN Thin Films Case Study

Coatings ◽  
2018 ◽  
Vol 8 (5) ◽  
pp. 196 ◽  
Author(s):  
Jan Tomastik ◽  
Radim Ctvrtlik ◽  
Martin Drab ◽  
Jan Manak
Keyword(s):  
Thin Films ◽  
Acoustic Emission ◽  
Test Evaluation ◽  
Acoustic Emission Test ◽  
Sicn Thin Films

Effect of varying nitrogen flow rates on the optical properties of amorphous-SiCN thin films

2016 ◽  
Author(s):  
Mohd Azam Abdul Rahman ◽  
Goh Boon Tong ◽  
Mohamad Rusop Mahmood ◽  
Chiu Wee Siong ◽  
Haw Choon Yian ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Nitrogen Flow ◽  
Flow Rates ◽  
Sicn Thin Films
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