Minimum detection limit and spatial resolution of thin-sample field-emission electron probe microanalysis

2013 ◽  
Vol 135 ◽  
pp. 64-70 ◽  
Author(s):  
Yugo Kubo ◽  
Kotaro Hamada ◽  
Akira Urano
2015 ◽  
Vol 21 (6) ◽  
pp. 1398-1405 ◽  
Author(s):  
Yugo Kubo ◽  
Koji Kuramochi

AbstractTo observe the fine distribution of minor aluminum and germanium dopants in the erbium-doped fiber (EDF) core of an optical amplifier, a sample thinning technique was applied for field emission electron probe microanalysis (FE-EPMA) together with wavelength-dispersive X-ray spectrometry. This technique significantly improved the spatial resolution without much degradation of the minimum detection limit for FE-EPMA. As such, this enabled us to observe the distribution of minor dopants in EDF. Moreover, we propose a very simple sample preparation to prevent electron-beam radiation damage, a problem involved with FE-EPMA of low-conductivity materials such as SiO2 glass, which is the main component of EDF.


2011 ◽  
Vol 17 (S2) ◽  
pp. 624-625 ◽  
Author(s):  
P McSwiggen ◽  
N Mori ◽  
M Takakura ◽  
C Nielsen

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.


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