In situ environmental transmission electron microscope (ETEM) could provide intuitive and solid proof for the local structure and chemical evolution of materials under practical working conditions. In particular, coupled with atmosphere and thermal field, the behavior of nano catalysts could be directly observed during the catalytic reaction. Through the change of lattice structure, it can directly correlate the relationship between the structure, size and properties of materials in the nanoscale, and further directly and accurately, which is of great guiding value for the study of catalysis mechanism and the optimization of catalysts. As an outstanding catalytic material in the application of methane reforming, molybdenum oxide (MoO3)-based materials and its deoxidation process were studied by in situ ETEM method. The corresponding microstructures and components evolution were analyzed by diffraction, high-resolution transmission electron microscopy (HRTEM) and electron energy loss spectrum (EELS) techniques. MoO3 had a good directional deoxidation process accompanied with the process of nanoparticles crushing and regrowth in hydrogen (H2) and thermal field. However, in the absence of H2, the samples would exhibit different structural evolution.