A novel ultrasonic precise bonding with non-constant amplitude control for thermalplastic polymer MEMS

Ultrasonics ◽  
2018 ◽  
Vol 84 ◽  
pp. 404-410 ◽  
Author(s):  
Yibo Sun ◽  
Xiaodong Liu ◽  
Xinhua Yang
2012 ◽  
Vol 629 ◽  
pp. 671-675 ◽  
Author(s):  
Zhen Yao ◽  
Zhong Ning Guo ◽  
Yong Jun Zhang

An ultrasonic power for rotary machining is introduced based on ARM. Its frequency tracking principle is analyzed. The improved accurate frequency tracking method using a phase lock loops (PLL) is presented. The control circuit based on ARM is designed and the presentation of system program flow chart is given. The experimental result proved that the ultrasonic power system can realize quick and accurate frequency tracking. Ihe power can work well with constant amplitude control.


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