A novel ultrasonic precise bonding with non-constant amplitude control for thermalplastic polymer MEMS
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2015 ◽
Vol 25
(8)
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pp. 541-543
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2012 ◽
Vol 629
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pp. 671-675
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2020 ◽
Vol 140
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pp. 299-302
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2004 ◽
2015 ◽