Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(02)00964-x ◽

2002 ◽

Vol 303 (1) ◽

pp. 54-63 ◽

Author(s):

P.S. Lysaght ◽

P.J. Chen ◽

R. Bergmann ◽

T. Messina ◽

R.W. Murto ◽

...

Keyword(s):

Thermal Stability ◽

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

Thermal Stability Of ◽

High K Gate Dielectric

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Improved thermal stability of Al2O3/HfO2/Al2O3 high-k gate dielectric stack on GaAs

Applied Physics Letters ◽

10.1063/1.3377915 ◽

2010 ◽

Vol 96 (14) ◽

pp. 142112 ◽

Author(s):

Dong Chan Suh ◽

Young Dae Cho ◽

Sun Wook Kim ◽

Dae-Hong Ko ◽

Yongshik Lee ◽

...

Keyword(s):

Thermal Stability ◽

Gate Dielectric ◽

High K ◽

Thermal Stability Of ◽

High K Gate Dielectric

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Thermal Stability and Electrical Properties of High-k Gate Dielectric Materials

2006 International Workshop on Junction Technology ◽

10.1109/iwjt.2006.1669482 ◽

2006 ◽

Author(s):

A.P. Huang ◽

P.K. Chu ◽

P.K. Chu

Keyword(s):

Thermal Stability ◽

Electrical Properties ◽

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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Thermal Stability and Electrical Properties of High-k Gate Dielectric Materials

2006 International Workshop on Junction Technology ◽

10.1109/iwjt.2006.220895 ◽

2006 ◽

Author(s):

A.P. Huang ◽

P.K. Chu

Keyword(s):

Thermal Stability ◽

Electrical Properties ◽

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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Thermal stability and electrical properties of titanium-aluminum oxide ultrathin films as high-k gate dielectric materials

Journal of Applied Physics ◽

10.1063/1.2432401 ◽

2007 ◽

Vol 101 (3) ◽

pp. 034102 ◽

Author(s):

L. Shi ◽

Y. D. Xia ◽

B. Xu ◽

J. Yin ◽

Z. G. Liu

Keyword(s):

Thermal Stability ◽

Electrical Properties ◽

Aluminum Oxide ◽

Ultrathin Films ◽

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

Titanium Aluminum ◽

High K Gate Dielectric

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Development of High-K Gate Dielectric Materials

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2008.00865 ◽

2008 ◽

Vol 23 (5) ◽

pp. 865-871 ◽

Author(s):

De-Qi WU

Keyword(s):

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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Thermal stability and electrical properties of Zr silicate films for high-k gate-dielectric applications, as prepared by pulsed laser deposition

Applied Physics A ◽

10.1007/s00339-003-2187-4 ◽

2005 ◽

Vol 80 (2) ◽

pp. 321-324 ◽

Author(s):

J. Zhu ◽

Z.G. Liu ◽

M. Zhu ◽

G.L. Yuan ◽

J.M. Liu

Keyword(s):

Thermal Stability ◽

Electrical Properties ◽

Pulsed Laser Deposition ◽

Gate Dielectric ◽

Pulsed Laser ◽

Laser Deposition ◽

High K ◽

High K Gate Dielectric

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First-principles modeling of high-k gate dielectric materials

Computational Materials Science ◽

10.1016/s0927-0256(01)00209-9 ◽

2002 ◽

Vol 23 (1-4) ◽

pp. 43-47 ◽

Author(s):

Kyeongjae Cho

Keyword(s):

First Principles ◽

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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Lanthanide-Based High-k Gate Dielectric Materials

High Permittivity Gate Dielectric Materials - Springer Series in Advanced Microelectronics ◽

10.1007/978-3-642-36535-5_9 ◽

2013 ◽

pp. 343-369 ◽

Author(s):

Daniel J. Lichtenwalner

Keyword(s):

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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CHC degradation of strained devices based on SiON and high-k gate dielectric materials

Microelectronic Engineering ◽

10.1016/j.mee.2011.03.094 ◽

2011 ◽

Vol 88 (7) ◽

pp. 1408-1411 ◽

Author(s):

E. Amat ◽

R. Rodríguez ◽

M.B. González ◽

J. Martín-Martínez ◽

M. Nafría ◽

...

Keyword(s):

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

High K Gate Dielectric

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Improved IGZO-TFT structure Using High-k Gate Dielectric Materials

2019 International Conference on Wireless Technologies, Embedded and Intelligent Systems (WITS) ◽

10.1109/wits.2019.8723852 ◽

2019 ◽

Author(s):

Abdelhafid Marroun ◽

Naima Amar Touhami ◽

Taj-Eddin El Hamadi

Keyword(s):

Gate Dielectric ◽

Dielectric Materials ◽

High K ◽

Igzo Tft ◽

High K Gate Dielectric

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