Effects of bias voltage and temperature on mechanical properties of Ti–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques
2004 ◽
Vol 55
(4)
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pp. 286-291
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2004 ◽
Vol 188-189
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pp. 425-430
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2000 ◽
Vol 51
(7)
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pp. 740-744
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2018 ◽
Vol 750
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pp. 560-569
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2004 ◽
Vol 58
(14)
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pp. 1993-1998
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