Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing

2004 ◽  
Vol 447-448 ◽  
pp. 148-152 ◽  
Author(s):  
J.Y. Sze ◽  
B.K. Tay ◽  
D. Sheeja ◽  
S.P. Lau ◽  
Y.Q. Fu ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Optical And Electrical Properties ◽  
Amorphous Carbon Films ◽  
Filtered Cathodic Vacuum Arc

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

2002 ◽  
Vol 195 (1-4) ◽  
pp. 107-116 ◽  
Author(s):  
L.J Yu ◽  
D Sheeja ◽  
B.K Tay ◽  
Daniel H.C Chua ◽  
W.I Milne ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Filtered Cathodic Vacuum Arc

Characterization of Boron- and Phosphorous-Incorporated Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Vacuum Arc Process

2009 ◽  
Vol 48 (6) ◽  
pp. 065501 ◽  
Author(s):  
Omvir Singh Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
Sonnada Math Shivaprasad ◽  
Bukinakere Subbakrihniah Satyanarayana ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Filtered Cathodic Vacuum Arc
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