A method of locating dried residue on a semiconductor wafer in vapor phase decomposition-total-reflection X-ray fluorescence spectrometry by monitoring scattered X-rays

2001 ◽  
Vol 56 (11) ◽  
pp. 2293-2300 ◽  
Author(s):  
Yoshihiro Mori ◽  
Kenichi Uemura ◽  
Motoyuki Yamagami ◽  
Takashi Yamada
Keyword(s):  
Vapor Phase ◽  
Total Reflection ◽  
Fluorescence Spectrometry ◽  
X Rays ◽  
Phase Decomposition ◽  
Semiconductor Wafer ◽  
X Ray

scholarly journals Analysis of light elements on Si wafer by vapor-phase decomposition/total reflection X-ray fluorescence.

1999 ◽  
Vol 48 (11) ◽  
pp. 1005-1011 ◽  
Author(s):  
Motoyuki YAMAGAMI ◽  
Masahiro NONOGUCHI ◽  
Takashi YAMADA ◽  
Takashi SHOJI ◽  
Tadashi UTAKA ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Total Reflection ◽  
Phase Decomposition ◽  
Light Elements ◽  
X Ray ◽  
Si Wafer

Determination of Oxygen and Nitrogen in Various Materials by X-Ray Fluorescence Spectrometry

1983 ◽  
Vol 27 ◽  
pp. 547-556 ◽  
Author(s):  
T. Arai ◽  
S. Ohara
Keyword(s):  
Bragg Reflection ◽  
Total Reflection ◽  
Fluorescence Spectrometry ◽  
X Rays ◽  
Spectrographic Analysis ◽  
X Ray ◽  
The Past ◽  
Detector Window ◽  
High Absorption

Spectrographic analysis for carbon and boron using fluorescent x-rays has been studied over the past few years; principles and applications for using those ultra-soft x-rays were described, based on the combination of total reflection and filtering rather than on the wavelength dispersive method of Bragg reflection (1, 2). However, oxygen and nitrogen, with x-ray wavelengths of 23.7lÅ and 31.60Å, respectively, cannot be detected as easily because of their high absorption by the detector window materials such as polypropylene, polyester or formvar films.

Enhanced analysis of particles and vapor phase decomposition droplets by total-reflection X-ray fluorescence

1999 ◽  
Vol 54 (10) ◽  
pp. 1409-1426 ◽  
Author(s):  
M Funahashi ◽  
M Matsuo ◽  
N Kawada ◽  
M Yamagami ◽  
R Wilson
Keyword(s):  
Vapor Phase ◽  
Total Reflection ◽  
Phase Decomposition ◽  
X Ray
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