Synthesis and characterization of cubic boron nitride films: substrate bias and ion flux effects

2001 ◽  
Vol 10 (9-10) ◽  
pp. 1886-1891 ◽  
Author(s):  
Quan Li ◽  
Z.F. Zhou ◽  
C.S. Lee ◽  
S.T. Lee ◽  
I. Bello
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Ion Flux ◽  
Synthesis And Characterization ◽  
Substrate Bias ◽  
Boron Nitride Films

Synthesis and characterization of cubic boron nitride films — investigations of growth and annealing processes

2002 ◽  
Vol 11 (3-6) ◽  
pp. 1272-1275 ◽  
Author(s):  
K. Sell ◽  
H. Holleck ◽  
H. Leiste ◽  
M. Stüber ◽  
S. Ulrich ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Synthesis And Characterization ◽  
Boron Nitride Films

Influence of d.c. substrate bias voltage on growth of cubic boron nitride films by radio frequency sputter

2000 ◽  
Vol 9 (9-10) ◽  
pp. 1779-1781
Author(s):  
Jinxiang Deng ◽  
Bo Wang ◽  
Liwen Tan ◽  
Bentao Cui ◽  
Hui Yan ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Radio Frequency ◽  
Bias Voltage ◽  
Cubic Boron Nitride ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Boron Nitride Films

Growth and characterization of epitaxial cubic boron nitride films on silicon

1991 ◽  
Vol 43 (8) ◽  
pp. 6816-6819 ◽  
Author(s):  
G. L. Doll ◽  
J. A. Sell ◽  
C. A. Taylor ◽  
R. Clarke
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Boron Nitride Films

Function of Substrate Bias Potential for Formation of Cubic Boron Nitride Films in Plasma CVD Technique

1987 ◽  
Vol 26 (Part 2, No. 9) ◽  
pp. L1435-L1436 ◽  
Author(s):  
Akiyoshi Chayahara ◽  
Haruki Yokoyama ◽  
Takeshi Imura ◽  
Yukio Osaka
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Substrate Bias ◽  
Plasma Cvd ◽  
Bias Potential ◽  
Boron Nitride Films

Preparation and characterization of thick cubic boron nitride films

2014 ◽  
Vol 23 (6) ◽  
pp. 066805 ◽  
Author(s):  
Ming-E Wang ◽  
Guo-Jia Ma ◽  
Chuang Dong ◽  
Shui-Li Gong
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Boron Nitride Films
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