Characteristics of hydrogenated amorphous carbon films deposited by large-area microwave-sustained surface wave plasma

2002 ◽  
Vol 11 (3-6) ◽  
pp. 976-979 ◽  
Author(s):  
M. Nagatsu ◽  
T. Sano ◽  
N. Takada ◽  
N. Toyoda ◽  
M. Tanga ◽  
...  
2000 ◽  
Vol 39 (Part 2, No. 9A/B) ◽  
pp. L929-L932 ◽  
Author(s):  
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Toru Sano ◽  
Noriharu Takada ◽  
Wang X. Guang ◽  
Takashi Hirao ◽  
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2004 ◽  
Vol 13 (4-8) ◽  
pp. 1505-1510 ◽  
Author(s):  
F. Piazza ◽  
D. Grambole ◽  
L. Zhou ◽  
F. Talke ◽  
C. Casiraghi ◽  
...  

2008 ◽  
Vol 47 (4) ◽  
pp. 2200-2204 ◽  
Author(s):  
Ya-Hsin Yang ◽  
Kuen Yi Wu ◽  
Chin-Yang Lee ◽  
Ming Yu Chen ◽  
Jennchang Hwang ◽  
...  

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