scholarly journals Physical Limitations on Transmission Electron Microscope Imaging of Lithium Battery Materials

2013 ◽  
Vol 19 (S2) ◽  
pp. 1228-1229 ◽  
Author(s):  
B.D. Levin ◽  
D.A. Muller
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Lithium Battery ◽  
Battery Materials ◽  
Transmission Electron ◽  
Microscope Imaging ◽  
Physical Limitations ◽  
Electron Microscope Imaging

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Fast Throughput Low Voltage Scanning Transmission Electron Microscope Imaging of Nano-Resolution Three Dimensional Tissue

2009 ◽  
Vol 15 (S2) ◽  
pp. 642-643
Author(s):  
M Bolorizadeh ◽  
HF Hess
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Low Voltage ◽  
Three Dimensional ◽  
Scanning Transmission Electron Microscope ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Microscope Imaging ◽  
Electron Microscope Imaging ◽  
Voltage Scanning

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

scholarly journals Automated Metrology on the Verticality of Cross-Sectioned Channel Hole at V-NAND with Over 200 Layers by Transmission Electron Microscope

2021 ◽  
Author(s):  
Dong-yeob Kim ◽  
Jong-ick Son ◽  
Christopher H Kang
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Measurement Method ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Microscope Imaging ◽  
High Layer ◽  
Nanoscale Measurements ◽  
Electron Microscope Imaging

Abstract In this paper, we present a nanoscale verticality measurement method for V-NAND with 200 or more layers of high layers using an automated transmission electron microscope, which has been developed a lot in the analysis field. Nanoscale measurements in cross-sectional images in 3D-NAND with such a high layer do not include both the top and bottom areas in one image of FOV. Therefore, it is very difficult for a person to objectively measure the etching angle or verticality of the channel hole. We experimented the verticality measurement of a channel hole in the two images in different areas using an automated transmission electron microscope imaging and measurement. In this paper, we present the results and analysis of the experiment and detailed metrology methods.

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