scholarly journals Evaluation of Confocal X-ray Analysis for Single-Atom Detection in a Thin Specimen by an Advanced Analytical Electron Microscope

2020 ◽  
Vol 26 (S2) ◽  
pp. 1512-1514
Author(s):  
Masashi Watanabe ◽  
Ray Egerton
Keyword(s):  
Electron Microscope ◽  
Single Atom ◽  
Thin Specimen ◽  
X Ray ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Atom Detection

point-Analysis Using the Extrapolation Method in the Analytical Electron microscope

1990 ◽  
Vol 48 (2) ◽  
pp. 430-431
Author(s):  
Zenji Horita ◽  
Ryuzo Nishimachi ◽  
Takeshi Sano ◽  
Minoru Nemoto
Keyword(s):  
Electron Microscope ◽  
Extrapolation Method ◽  
X Ray ◽  
Absorption Correction ◽  
Point Analysis ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Data Points ◽  
Identical Composition ◽  
X Ray Absorption

Absorption correction is often required in quantitative x-ray microanalysis of thin specimens using the analytical electron microscope. For such correction, it is convenient to use the extrapolation method[l] because the thickness, density and mass absorption coefficient are not necessary in the method. The characteristic x-ray intensities measured for the analysis are only requirement for the absorption correction. However, to achieve extrapolation, it is imperative to obtain data points more than two at different thicknesses in the identical composition. Thus, the method encounters difficulty in analyzing a region equivalent to beam size or the specimen with uniform thickness. The purpose of this study is to modify the method so that extrapolation becomes feasible in such limited conditions. Applicability of the new form is examined by using a standard sample and then it is applied to quantification of phases in a Ni-Al-W ternary alloy.The earlier equation for the extrapolation method was formulated based on the facts that the magnitude of x-ray absorption increases with increasing thickness and that the intensity of a characteristic x-ray exhibiting negligible absorption in the specimen is used as a measure of thickness.

Peak-to-background measurements on a 300-kV TEM/STEM

1992 ◽  
Vol 50 (2) ◽  
pp. 1236-1237 ◽  
Author(s):  
S. M. Zemyan ◽  
D. B. Williams
Keyword(s):  
Electron Microscope ◽  
X Ray ◽  
Background Ratio ◽  
Window Method ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Cr Film

As has been reported elsewhere, a thin evaporated Cr film can be used to monitor the x-ray peak to background ratio (P/B) in an analytical electron microscope. Presented here are the results of P/B measurements for the Cr Ka line on a Philips EM430 TEM/STEM, with Link Si(Li) and intrinsic Ge (IG) x-ray detectors. The goal of the study was to determine the best conditions for x-ray microanalysis.We used the Fiori P/B definition, in which P/B is the ratio of the total peak integral to the average background in a 10 eV channel beneath the peak. Peak and background integrals were determined by the window method, using a peak window from 5.0 to 5.7 keV about Cr Kα, and background windows from 4.1 to 4.8 keV and 6.3 to 7.0 keV.

Practical Estimation of Analytical Sensitivity for EDS in an Intermediate Voltage FEG-STEM

1997 ◽  
Vol 3 (S2) ◽  
pp. 965-966
Author(s):  
M. Watanabe ◽  
D. W. Ackland ◽  
D. B. Williams
Keyword(s):  
Spatial Resolution ◽  
Single Atom ◽  
Acquisition Time ◽  
Analytical Sensitivity ◽  
X Ray ◽  
Quantitative Microanalysis ◽  
Analytical Electron ◽  
Atom Detection ◽  
Electron Microscopes ◽  
Image Position

One of the ultimate objectives for energy-dispersive X-ray spectrometry (EDS) in the analytical electron microscope (AEM) is single-atom detection in thin specimens, as well as quantitative microanalysis with high accuracy approaching ±1% relative. In order to realize the single-atom analysis, the design of the AEM has to be optimized with respect to improvements in spatial resolution and detectability limits. The detectability limit, as defined by the minimum mass fraction (MMF), is given by:where P is the peak intensity of interest, (P/B) is the peak-to-background ratio for that peak, and r is the acquisition time. To improve the sensitivity for analysis, any or all of the variables P, (P/B), and τ should be increased. Intermediate-voltage analytical electron microscopes combined with high brightness field-emission gun (FEG) are expected to improve the MMF, while maintaining high spatial resolution. Additionally, the MMF should also be improved by maximizing the solid angle of X-ray collection.

Optimizing Spatial Resolution for X-ray Microanalysis

2001 ◽  
Vol 7 (S2) ◽  
pp. 694-695
Author(s):  
Eric Lifshin ◽  
Raynald Gauvin ◽  
Di Wu
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Spatial Resolution ◽  
Maximum Diameter ◽  
Thin Sections ◽  
X Ray ◽  
Analytical Electron ◽  
Analytical Electron Microscope ◽  
Limiting Value ◽  
Made In

In Castaing’s classic Ph.D. dissertation he described how the limiting value of x-ray spatial resolution for x-ray microanalysis, of about 1 μm, was not imposed by the diameter of the electron beam, but by the size of the region excited inside the specimen. Fifty years later this limit still applies to the majority of measurement made in EMAs and SEMs, even though there is often a need to analyze much finer structures. When high resolution chemical analysis is required, it is generally necessary to prepare thin sections and examine them in an analytical electron microscope where the maximum diameter of the excited volume may be as small as a few nanometers. Since it is not always possible or practical, it is important to determine just what is the best spatial resolution attainable for the examination of polished or “as received” samples with an EMA or SEM and how to achieve it experimentally.

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