Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge mass spectrometry source
1998 ◽
Vol 13
(12)
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pp. 1303-1311
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2017 ◽
Vol 89
(2)
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pp. 1382-1388
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2000 ◽
Vol 76
(6)
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pp. 954-961
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2000 ◽
Vol 55
(4)
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pp. 403-428
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