Combining electrothermal vaporization inductively coupled plasma mass spectrometry with in situ TMAH thermochemolysis for the direct determination of trace impurities in a polymer-based photoresist

2006 ◽  
Vol 21 (3) ◽  
pp. 311 ◽  
Author(s):  
Yun-chang Sun ◽  
Chu-Jung Ko
2010 ◽  
Vol 43 (6) ◽  
pp. 949-959 ◽  
Author(s):  
Frederico Garcia Pinto ◽  
Fabio Grandis Lepri ◽  
Tatiana Dillenburg Saint'Pierre ◽  
José Bento Borba da Silva ◽  
Letícia Malta Costa ◽  
...  

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