Combining electrothermal vaporization inductively coupled plasma mass spectrometry with in situ TMAH thermochemolysis for the direct determination of trace impurities in a polymer-based photoresist
2006 ◽
Vol 21
(3)
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pp. 311
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2004 ◽
Vol 19
(3)
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pp. 387
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2016 ◽
Vol 118
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pp. 119-126
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2007 ◽
Vol 598
(2)
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pp. 214-218
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1999 ◽
Vol 383
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pp. 253-261
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1997 ◽
1997 ◽
Vol 12
(4)
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pp. 421-428
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1997 ◽
Vol 353
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pp. 173-180
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2001 ◽
Vol 370
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pp. 513-520
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