High‐ Q photonic crystal cavities realised using deep ultraviolet lithography

2015 ◽  
Vol 51 (16) ◽  
pp. 1277-1279 ◽  
Author(s):  
K. Welna ◽  
K. Debnath ◽  
T.F. Krauss ◽  
L. O'Faolain
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Cavities ◽  
Ultraviolet Lithography ◽  
High Q ◽  
Deep Ultraviolet

Silicon slotted photonic crystal cavities fabricated by deep-ultraviolet lithography

2021 ◽  
Author(s):  
Thi Hong Cam Hoang ◽  
Thuy Van Nguyen ◽  
Thanh Binh Pham ◽  
Van Dai Pham ◽  
Van Hoi Pham ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Cavities ◽  
Ultraviolet Lithography ◽  
Deep Ultraviolet

scholarly journals Nanofabrication of high Q, transferable, diamond resonators

Nanoscale ◽  
2021 ◽  
Author(s):  
Blake Eric Philip Regan ◽  
Aleksandra Trycz ◽  
Johannes Fröch ◽  
Otto Schaeper ◽  
Sejeong Kim ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Cavities ◽  
High Q

Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components – including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single...

High-Q-factor nanobeam photonic crystal cavities in bulk silicon carbide

2018 ◽  
Vol 113 (23) ◽  
pp. 231106 ◽  
Author(s):  
Bong-Shik Song ◽  
Seungwoo Jeon ◽  
Heungjoon Kim ◽  
Dongyeon Daniel Kang ◽  
Takashi Asano ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Photonic Crystal ◽  
Q Factor ◽  
Bulk Silicon ◽  
Photonic Crystal Cavities ◽  
High Q

Observations of temporal regenerative oscillations in high-Q heterostructured photonic crystal cavities

2012 ◽  
Author(s):  
Jinghui Yang ◽  
Tingyi Gu ◽  
Jiangjun Zheng ◽  
Xiaodong Yang ◽  
Mingbin Yu ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Cavities ◽  
High Q

CMOS-Compatible High-Q Photonic Crystal Cavities

2018 ◽  
Author(s):  
Delphin Dodane ◽  
Jerôme Bourderionnnet ◽  
Sylvain Combrié ◽  
Alfredo De Rossi
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Cavities ◽  
High Q ◽  
Cmos Compatible
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