Optimised proton implantation step for vertical-cavity surface-emitting lasers
2016 ◽
Vol 55
(8S3)
◽
pp. 08RC01
◽
2015 ◽
Vol 743
◽
pp. 796-799
Keyword(s):
1999 ◽
Vol 09
(PR2)
◽
pp. Pr2-3
◽
Keyword(s):