Simulation study on squeeze film air damping

Xiang Tian; Wei Sheng; Feifei Tian; Yang Lu; Longyun Wang

doi:10.1049/mnl.2019.0566

Simulation study on squeeze film air damping

Micro & Nano Letters ◽

10.1049/mnl.2019.0566 ◽

2020 ◽

Vol 15 (9) ◽

pp. 576-581

Author(s):

Xiang Tian ◽

Wei Sheng ◽

Feifei Tian ◽

Yang Lu ◽

Longyun Wang

Keyword(s):

Simulation Study ◽

Squeeze Film ◽

Air Damping

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Models for analyzing squeeze film air damping depending on oscillation modes of micro/nano beam resonators

Archive of Applied Mechanics ◽

10.1007/s00419-020-01775-3 ◽

2020 ◽

Author(s):

Dang Van Hieu ◽

Le Van Tam ◽

Kazuhiro Hane ◽

Chu Manh Hoang

Keyword(s):

Squeeze Film ◽

Air Damping ◽

Oscillation Modes

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Analysis of squeeze film air damping in fixed-fixed beam RF MEMS switches

2016 International Conference on Control, Instrumentation, Communication and Computational Technologies (ICCICCT) ◽

10.1109/iccicct.2016.7988003 ◽

2016 ◽

Author(s):

A Anoushka Kumar ◽

R Resmi

Keyword(s):

Rf Mems ◽

Squeeze Film ◽

Mems Switches ◽

Air Damping ◽

Rf Mems Switches ◽

Fixed Beam

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A macromodel for squeeze-film air damping in the free-molecule regime

Physics of Fluids ◽

10.1063/1.3275844 ◽

2010 ◽

Vol 22 (1) ◽

pp. 012001 ◽

Cited By ~ 9

Author(s):

Gang Hong ◽

Wenjing Ye

Keyword(s):

Squeeze Film ◽

Free Molecule ◽

Air Damping

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Investigation of a compact model for squeeze-film air damping in the free molecular regime

Journal of Physics Conference Series ◽

10.1088/1742-6596/1324/1/012074 ◽

2019 ◽

Vol 1324 ◽

pp. 012074

Author(s):

Pu Li ◽

Cunhao Lu

Keyword(s):

Compact Model ◽

Squeeze Film ◽

Free Molecular Regime ◽

Air Damping

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Analysis of Squeeze Film Air Damping with Lattice Boltzmann Method in Transition Regime

2019 IEEE 4th International Conference on Integrated Circuits and Microsystems (ICICM) ◽

10.1109/icicm48536.2019.8977194 ◽

2019 ◽

Author(s):

Chengde Zhu ◽

Pu Li ◽

Longfei Yang ◽

Yuming Fang

Keyword(s):

Lattice Boltzmann Method ◽

Lattice Boltzmann ◽

Squeeze Film ◽

Transition Regime ◽

Air Damping ◽

Boltzmann Method

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Multiple-Relaxation-Time Lattice Boltzmann Model for Squeeze Film Air Damping of Large Knudsen Number in MEMS

2020 IEEE 3rd International Conference on Electronics Technology (ICET) ◽

10.1109/icet49382.2020.9119544 ◽

2020 ◽

Author(s):

Pu Li ◽

Chengde Zhu ◽

Yuming Fang

Keyword(s):

Relaxation Time ◽

Knudsen Number ◽

Lattice Boltzmann ◽

Lattice Boltzmann Model ◽

Squeeze Film ◽

Air Damping ◽

Multiple Relaxation Time ◽

Boltzmann Model

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Squeeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors

Sensors ◽

10.3390/s17051119 ◽

2017 ◽

Vol 17 (5) ◽

pp. 1119 ◽

Cited By ~ 3

Author(s):

◽

Keyword(s):

Squeeze Film ◽

Air Damping ◽

Five Axis

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Effect of oscillation mode on the free-molecule squeeze-film air damping

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2010.5592237 ◽

2010 ◽

Author(s):

Gang Hong ◽

Wenjing Ye

Keyword(s):

Oscillation Mode ◽

Squeeze Film ◽

Free Molecule ◽

Air Damping

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Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/13/6/301 ◽

2003 ◽

Vol 13 (6) ◽

pp. 795-800 ◽

Cited By ~ 103

Author(s):

Minhang Bao ◽

Heng Yang ◽

Yuancheng Sun ◽

Paddy J French

Keyword(s):

Reynolds Equation ◽

Squeeze Film ◽

Analytical Analysis ◽

Air Damping ◽

Modified Reynolds Equation

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Squeeze film air damping in MEMS

Sensors and Actuators A Physical ◽

10.1016/j.sna.2007.01.008 ◽

2007 ◽

Vol 136 (1) ◽

pp. 3-27 ◽

Cited By ~ 428

Author(s):

Minhang Bao ◽

Heng Yang

Keyword(s):

Squeeze Film ◽

Air Damping

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