Hydrogen incorporation in the early stages of hydrogenated amorphous silicon deposition evaluated by real time infrared reflectance spectroscopy

1993 ◽  
Vol 63 (4) ◽  
pp. 461-463 ◽  
Author(s):  
M. Katiyar ◽  
G. F. Feng ◽  
Y. H. Yang ◽  
J. R. Abelson ◽  
N. Maley
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