The effect of topographical local charging on the etching of deep-submicron structures in SiO2 as a function of aspect ratio

2001 ◽  
Vol 78 (7) ◽  
pp. 883-885 ◽  
Author(s):  
Jun Matsui ◽  
Nobuhiko Nakano ◽  
Zoran Lj. Petrović ◽  
Toshiaki Makabe
Keyword(s):  
Aspect Ratio ◽  
Deep Submicron ◽  
Submicron Structures

Advanced inspection technique for deep-submicron and high-aspect-ratio contact holes

2002 ◽  
Author(s):  
Miyako Matsui ◽  
Mari Nozoe ◽  
Keiko Arauchi ◽  
Atsuko Takafuji ◽  
Hidetoshi Nishiyama ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Deep Submicron

X-ray lithography for devices with high aspect ratio polymer submicron structures

2007 ◽  
Vol 84 (5-8) ◽  
pp. 1235-1239 ◽  
Author(s):  
Timo Mappes ◽  
Sven Achenbach ◽  
Juergen Mohr
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
X Ray ◽  
Submicron Structures

scholarly journals Deep-submicron structures in YBCO: fabrication and measurements

1995 ◽  
Vol 5 (2) ◽  
pp. 1448-1451 ◽  
Author(s):  
A.J.M. van der Harg ◽  
E. van der Drift ◽  
P. Hadley
Keyword(s):  
Deep Submicron ◽  
Submicron Structures

Soft X-ray lithography of high aspect ratio SU8 submicron structures

2008 ◽  
Vol 14 (9-11) ◽  
pp. 1683-1688 ◽  
Author(s):  
Elena Reznikova ◽  
Juergen Mohr ◽  
Martin Boerner ◽  
Vladimir Nazmov ◽  
Peter-Juergen Jakobs
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
X Ray ◽  
Submicron Structures

Highly transparent poly(glycidyl methacrylate-co-acryloisobutyl POSS) for 100 μm-thick submicron patterns with an aspect ratio over 100

2017 ◽  
Vol 53 (58) ◽  
pp. 8172-8175 ◽  
Author(s):  
Kwanghyun Kim ◽  
Sunyoung Yu ◽  
Sung-Wook Kim ◽  
Taegeon Kim ◽  
Sang-Min Kim ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Glycidyl Methacrylate ◽  
First Report ◽  
Submicron Structures

This is the first report on the fabrication of defect-free submicron structures with more than 100 μm thickness and an aspect ratio over 100.

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